Micro- and Nano-Fabrication of a Single-Electron Biosensor Array

***Archived: This is a past project,  it is not on offer at the moment!***

The fabrication of single electron transistors and/or highly sensitive biosensors is still a challenging task on account of the tight control required to get proper shapes and size of the nano-electrodes. The nano-sized tips and the separation of a few nano-meters between electrode pairs are critical features. Conventional lithography is not suited to obtain these features because of the resolution limits, so that the alternative approaches involve the use of electron beam lithography, focused ion beam lithography or scanning probe nanolithography. Moreover, the literature reports many different proofs that Single-Trapping Nanostructures, such as quantum dots, improve the performances of Ampérometric Biosensors. However, a clear theoretical explanation and a reliable technology to built such nano-devices are not yet well established.

Project Description:
The purpose of this master project is to investigate the possibility to develop a reliable technology to fabricate Single-Electron Biosensor Array by using well established conventional lithographic micro-technology for metal deposition on Silicon or on Glass Wafers in combination with the most advance Focused Ion Beam Lithography. An array of Nano-Bio-Sensors will be developed and tested in order to identify Single-Electron Phenomena occurring during the device functioning.


  • Design of the Single-Electron Biosensors Array layout
  • Micro-fabrication of the Electrodes Array
  • Nano-fabrication of the Single-Electron Trapping regions in the micro-fabricated Array
  • Testing the Ampérometric behaviour of the Micro-Nano-fabricated Array


  • Basic knowledge on CAD Systems
  • Basic Knowledge on Lithography
  • Experience with electrical measurements with lab equipments
  • Interest in Single-Electron Devices


This project was supervised by Sandro Carrara.


***Archived: This is a past project,  it is not on offer at the moment!***